Design and experiments of micro pump using ICPF actuator

The authors propose a new prototype model of a micro pump using an ICPF (ionic conducting polymer film) actuator as the servo actuator. This micro pump consists of two one-way valves that make use of the same ICPF actuator. The overall size of this micro pump prototype is 12 mm in diameter and 20 mm in length. The actuating mechanism is as follows. (1) The ICPF actuator used as the diaphragm is bent into the anode side by application of electricity. Then the volume of the pump chamber increases, resulting in the inflow of liquid from the inlet to the chamber. (2) By changing the current direction, the volume of the pump chamber decreases, resulting in liquid flow from the chamber to the outlet. (3) When the ICPF actuator is given a sinusoidal voltage, the micro pump provides liquid flow from the inlet to the outlet continuously. The characteristics of the micro pump have been measured. The experimental results indicate that the micro pump has satisfactory responses