Start-up response improvement for a MEMS inclinometer

A MEMS inclinometer SCA830 manufactured by Murata was used in a battery-powered handheld instrument designed for measurement of parallelism during fabrication of coil springs. The inclinometer offers a power down mode to reduce power consumption by stopping the internal clocks and resetting the control registers of the device. The power reduction is very significant; however, a transient response was observed in output data. This article describes a compensation technique to suppress this effect, and therefore significantly reduce the startup time. In this case, the model allowed to reduce the start-up time ten times.