W-band MEMS TWT- array

Author

Lei, Li ; Gao, Wei

Author_Institution

Legentech Inc., Fremont, CA, USA

fYear

2004

fDate

27 Sept.-1 Oct. 2004

Firstpage

681

Lastpage

682

Abstract

A novel traveling wave tube (TWT) array based on micro electromechanical systems (MEMS) fabrication is proposed. It consists of TWT elements coupled together under a common magnetic field. The TWT-array has the capability to generate high-power microwaves with relatively low-voltage electron beams. The low-voltage operation reduces the system overhead and leads to a miniaturized millimeter wave generator. The fabrication adopts well developed IC and MEMS processing technology, and be incorporated in a MEMS post package stage as a part of the process. The proposed structure leads to a new class of compact, high efficiency, and reliable W-band frequency sources.

Keywords

cathodes; electron beams; field emitter arrays; integrated circuit design; integrated circuit packaging; klystrons; metallic thin films; micropumps; microwave generation; microwave tubes; millimetre wave generation; molybdenum; travelling wave tubes; waveguide antenna arrays; IC processing technology; MEMS post package; MEMS processing technology; Mo-Si; TWT array; W-band MEMS; W-band frequency sources; W-band microelectromechanical systems; electron beam; magnetic field; microwave generation; millimeter wave generator; system overhead; traveling wave tube array; Couplings; Electromechanical systems; Electron beams; Fabrication; High power microwave generation; Integrated circuit packaging; Magnetic fields; Micromechanical devices; Microwave generation; Millimeter wave technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on

Print_ISBN

0-7803-8490-3

Type

conf

DOI

10.1109/ICIMW.2004.1422274

Filename

1422274