Title :
Experimental evaluation of vibration sensor based on interferometer with phase modulated light
Author :
Miyata, Naoyuki ; Tanaka, Yuichi ; Kurokawa, Takashi
Author_Institution :
Grad. Sch. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
Simple and accurate vibration sensor using an interferometer with phase-modulated light is demonstrated. The measurement error is experimentally evaluated. The displacement measurement of a PZT mirror vibrating at 75 kHz is compared with conventional methods.
Keywords :
Michelson interferometers; displacement measurement; lead compounds; measurement errors; mirrors; optical modulation; optical sensors; phase modulation; vibration measurement; PZT; PZT mirror; displacement measurement; frequency 75 kHz; interferometer; measurement error; phase modulated light; vibration sensor; Displacement measurement; Distortion measurement; Interference; Mirrors; Phase modulation; Vibration measurement; Vibrations;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600329
