DocumentCode
3061712
Title
Experimental evaluation of vibration sensor based on interferometer with phase modulated light
Author
Miyata, Naoyuki ; Tanaka, Yuichi ; Kurokawa, Takashi
Author_Institution
Grad. Sch. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
fYear
2013
fDate
June 30 2013-July 4 2013
Firstpage
1
Lastpage
2
Abstract
Simple and accurate vibration sensor using an interferometer with phase-modulated light is demonstrated. The measurement error is experimentally evaluated. The displacement measurement of a PZT mirror vibrating at 75 kHz is compared with conventional methods.
Keywords
Michelson interferometers; displacement measurement; lead compounds; measurement errors; mirrors; optical modulation; optical sensors; phase modulation; vibration measurement; PZT; PZT mirror; displacement measurement; frequency 75 kHz; interferometer; measurement error; phase modulated light; vibration sensor; Displacement measurement; Distortion measurement; Interference; Mirrors; Phase modulation; Vibration measurement; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location
Kyoto
Type
conf
DOI
10.1109/CLEOPR.2013.6600329
Filename
6600329
Link To Document