DocumentCode
3063090
Title
Breakthrough to the “Silicon limit” of power devices
Author
Chen, Xing Bi
Author_Institution
Univ. of Electron. Sci. & Technol. of China, Chengdu, China
fYear
1998
fDate
1998
Firstpage
141
Lastpage
144
Abstract
The results of some new developments in voltage sustaining structures for both vertical and lateral power devices are presented. A figure of merit is defined for characterising the devices, show that they are far superior to those of prior art
Keywords
power integrated circuits; power semiconductor devices; semiconductor device breakdown; figure of merit; lateral power devices; vertical power devices; voltage sustaining structures; Art; Bipolar transistors; Bismuth; Breakdown voltage; Current density; Doping; Electron mobility; Paper technology; Permittivity; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location
Beijing
Print_ISBN
0-7803-4306-9
Type
conf
DOI
10.1109/ICSICT.1998.785827
Filename
785827
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