Title :
Novel MEMS devices for information systems
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
MEMS are paid more and more attention in the present information society. With the development of modern information technologies, information systems are becoming more compact, miniature and smart. MEMS devices and systems fit this trend well. The development and properties of MEMS technologies are reviewed. MEMS technologies are based on the technical inter-growing of microelectronics, materials science, mechanics, physics, chemistry, radio science, etc, and they have developed very fast from the very beginning. MEMS technologies are very promising for a wide range of information system applications. Some typical application examples are given.
Keywords :
information systems; integrated circuit technology; materials; materials science; micromachining; micromechanical devices; reviews; MEMS devices; MEMS technologies; chemistry; information systems; materials science; mechanics; microelectronics; micromachining; physics; radio science; Chemical technology; Ferroelectric materials; Information systems; Microelectromechanical devices; Microelectronics; Micromechanical devices; Packaging; Piezoelectric materials; Silicon; Superconducting materials;
Conference_Titel :
Radio Science Conference, 2004. Proceedings. 2004 Asia-Pacific
Print_ISBN :
0-7803-8404-0
DOI :
10.1109/APRASC.2004.1422379
