DocumentCode
3064413
Title
Design considerations for basic MEMS electrostatic actuators
Author
Hassanzadeh, Alireza
Author_Institution
ECE Dept., Univ. of Alabama in Huntsville, Huntsville, AL
fYear
2009
fDate
15-17 March 2009
Firstpage
271
Lastpage
273
Abstract
In this paper various practical and theoretical design considerations that lead to a successful MEMS electrostatic actuator design for laboratory-training purposes are examined and simulation results are presented. Two basic actuator structures cantilever beam and fixed beam are simulated using SUGAR MEMS simulation software. Simulation results show the proper size of the actuator for fabrication.
Keywords
electrostatic actuators; finite element analysis; MEMS; SUGAR; electrostatic actuator; finite element simulation; simulation software; Electrostatic actuators; Etching; Fabrication; Laboratories; MATLAB; Microelectromechanical devices; Micromechanical devices; Microstructure; Structural beams; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
System Theory, 2009. SSST 2009. 41st Southeastern Symposium on
Conference_Location
Tullahoma, TN
ISSN
0094-2898
Print_ISBN
978-1-4244-3324-7
Electronic_ISBN
0094-2898
Type
conf
DOI
10.1109/SSST.2009.4806807
Filename
4806807
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