Title :
Proportional difference method for determination of the threshold voltage and the effect inversion carrier mobility of an MOSFET
Author :
Xu, Mingzhen ; Tan, Changhua ; He, Yandong ; Xie, Bing ; Wang, Jingyan ; Wang, Liqi
Author_Institution :
Inst. of Microelectron., Beijing Univ., China
Abstract :
In this paper, we intend to present a simple and efficient spectral method for the determination of the threshold voltage of a MOSFET which is based upon the concept of the proportional difference operator. The uncertainty in determining the threshold voltage can be avoided, and the threshold voltage and effective inversion carrier mobility can be simultaneously and separately obtained by the peak position and peak height of proportional difference spectrum
Keywords :
MOSFET; carrier mobility; inversion layers; MOSFET; inversion carrier mobility; proportional difference operator; spectral method; threshold voltage; Current measurement; Difference equations; Electron mobility; Helium; MOS devices; MOSFET circuits; Microelectronics; Position measurement; Threshold voltage; Uncertainty;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.785912
