DocumentCode :
3065106
Title :
The new equipment for IC testing
Author :
Hua, Wang Qing ; Li, Lu Zong ; Zhong, Zhang Jian
Author_Institution :
Tianjin Inst. of Power Sources, China
fYear :
1998
fDate :
1998
Firstpage :
532
Lastpage :
535
Abstract :
The very large scale integration used for the design and fabrication of modern microelectronics devices should have good suitability for temperature. For example the space grade IC should withstand hard temperature shock from +125°C to -55°C or reverse in 5 mins. For failure analysis techniques, it is necessary to investigate the performance of an IC under different temperatures. Therefore the demand for new test equipment arises, which can cool or heat ICs to make the die temperature of the IC change from high to low or from low to high. There are some mechanical refrigeration systems that you can choose, but it is difficult to control the temperature of the IC, and this kind of apparatus often has problems in the summer. We have developed a new equipment with working temperatures in the range of -55°C~+125°C, it uses a thermoelectric cooler as cooling or heating units. We can easily control the cold plate temperature by means of regulating the input voltage. In this equipment, the cold side can be smoothly regulated, stabilized and indicated on the display. This paper introduces the design of the control system and multistage TEM cooling system, the cooling power of which is 3 W, when the temperature of cold side is -55°C and hot side is 30°C
Keywords :
VLSI; cooling; integrated circuit testing; production testing; temperature control; test equipment; thermoelectric devices; -55 to 125 C; 3 W; IC test equipment; VLSI testing; control system; die temperature; failure analysis techniques; multistage TEM cooling system; thermoelectric cooler; thermoelectric module; Control systems; Cooling; Electric shock; Fabrication; Failure analysis; Integrated circuit testing; Microelectronics; Temperature control; Test equipment; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
Type :
conf
DOI :
10.1109/ICSICT.1998.785939
Filename :
785939
Link To Document :
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