• DocumentCode
    3065106
  • Title

    The new equipment for IC testing

  • Author

    Hua, Wang Qing ; Li, Lu Zong ; Zhong, Zhang Jian

  • Author_Institution
    Tianjin Inst. of Power Sources, China
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    532
  • Lastpage
    535
  • Abstract
    The very large scale integration used for the design and fabrication of modern microelectronics devices should have good suitability for temperature. For example the space grade IC should withstand hard temperature shock from +125°C to -55°C or reverse in 5 mins. For failure analysis techniques, it is necessary to investigate the performance of an IC under different temperatures. Therefore the demand for new test equipment arises, which can cool or heat ICs to make the die temperature of the IC change from high to low or from low to high. There are some mechanical refrigeration systems that you can choose, but it is difficult to control the temperature of the IC, and this kind of apparatus often has problems in the summer. We have developed a new equipment with working temperatures in the range of -55°C~+125°C, it uses a thermoelectric cooler as cooling or heating units. We can easily control the cold plate temperature by means of regulating the input voltage. In this equipment, the cold side can be smoothly regulated, stabilized and indicated on the display. This paper introduces the design of the control system and multistage TEM cooling system, the cooling power of which is 3 W, when the temperature of cold side is -55°C and hot side is 30°C
  • Keywords
    VLSI; cooling; integrated circuit testing; production testing; temperature control; test equipment; thermoelectric devices; -55 to 125 C; 3 W; IC test equipment; VLSI testing; control system; die temperature; failure analysis techniques; multistage TEM cooling system; thermoelectric cooler; thermoelectric module; Control systems; Cooling; Electric shock; Fabrication; Failure analysis; Integrated circuit testing; Microelectronics; Temperature control; Test equipment; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    0-7803-4306-9
  • Type

    conf

  • DOI
    10.1109/ICSICT.1998.785939
  • Filename
    785939