Title :
ASET activities toward the 21st century
Author :
Ishitani, Akihiko
Author_Institution :
Assoc. of Super-Adv. Electron. Technol., Tokyo, Japan
Abstract :
ASET is a Japanese electronics research and development (R&D) consortium, and founded to innovate technology infrastructure for the 21st century. Firstly, MITI prepared this project, and asked NEDO for implementing this project. MITI is Ministry of International Trade and Industry, and NEDO is New Energy and Industrial Technology Development organization. NEDO informed this project to industry. Industry submitted application forms to NEDO. Qualified companies by NEDO organized ASET. ASET has 36 member companies. Of the 36, 18 companies are involved in semiconductor R&D of ASET
Keywords :
lithography; research initiatives; technological forecasting; ASET; Japanese electronics research and development consortium; lithography; semiconductor industry; technological innovation; Electron beams; Lithography; Mass production; Metrology; Optical design; Optical devices; Research and development; Throughput; Ultraviolet sources; Writing;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1999. International Symposium on
Conference_Location :
Taipei
Print_ISBN :
0-7803-5620-9
DOI :
10.1109/VTSA.1999.785984
