Title :
Non-contact resistance measurement of a flexible display substrate by Terahertz time domain spectroscopy
Author :
Tze-An Liu ; Yuh-Chuan Cheng ; Shih-Fang Chen ; Jin-Long Peng
Author_Institution :
Center for Meas. Stand., Ind. Technol. Res. Inst., Hsinchu, Taiwan
fDate :
June 30 2013-July 4 2013
Abstract :
The non-contact sheet resistance of the flexible display substrate is measured by Terahertz time domain spectroscopy. It is reasonable agree with the DC 4-point probe method, which proof the online inspection opportunity.
Keywords :
electric resistance measurement; flexible displays; inspection; materials testing; terahertz spectroscopy; DC four-point probe method; flexible display substrate; noncontact resistance measurement; noncontact sheet resistance; online inspection opportunity; terahertz time domain spectroscopy; Conductivity; Electrical resistance measurement; Films; Indium tin oxide; Positron emission tomography; Resistance; Substrates;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600525
