• DocumentCode
    3066846
  • Title

    Control of microstructures by two interfered femtosecond laser pluses using biprism

  • Author

    Konda, O. ; Sato, Takao ; Itoigawa, F. ; Ono, Shintaro ; Ota, Masashi

  • Author_Institution
    Nagoya Inst. of Technol., Nagoya, Japan
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Periodic microgrooves on Si wafer induced by interfered femtosecond laser pluses using biprism are reported. Shape of microstructures is controlled by laser fluence, scanning numbers, and base angle of biprism. Tribological property changes by microgrooves.
  • Keywords
    elemental semiconductors; laser materials processing; light interference; optical control; optical prisms; silicon; tribology; biprism; control microstructures; interfered femtosecond laser pluses; laser fluence; periodic microgrooves; scanning numbers; tribological property; Laser ablation; Laser beams; Microstructure; Silicon; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600558
  • Filename
    6600558
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3066846