Title :
3D microfabrication in YAG crystals by direct laser writing and chemical etching
Author :
Choudhury, Debaditya ; Rodenas, Airan ; Paterson, Lynn ; Jaque, D. ; Kar, Ajoy K.
Author_Institution :
Inst. of Photonics & Quantum Sci., Heriot-Watt Univ., Edinburgh, UK
fDate :
June 30 2013-July 4 2013
Abstract :
We report selective etching of mm-length direct laser written three-dimensional microstructures inside Nd:YAG crystals. The structures exhibit enhanced etching selectivity compared to unmodified YAG. Origin of this selectivity is investigated using Nd3+ micro-spectroscopy and micro-Raman.
Keywords :
crystals; etching; laser materials processing; microfabrication; neodymium; optical fabrication; solid lasers; visible spectroscopy; YAG:Nd; chemical etching; direct laser writing; micro-Raman; micro-spectroscopy; selective etching; three-dimensional microstructures; Crystals; Etching; Lasers; Microstructure; Three-dimensional displays; Ultrafast optics; Writing;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600562
