Title :
Embedded flash memories-technology assessment and future
Author :
Yoshikawa, Kuniyoshi
Author_Institution :
Micro & Custom LSI Div., Toshiba Corp., Kawasaki, Japan
Abstract :
While embedded flash technologies should be the key for the next decade system-on-a-chip, current aggressive scaling of logic CMOS devices increases the difficulty for the cost effective device realization. Various approaches and requirements for embedded flash devices will be discussed from broad viewpoints, such as device physics, process integration and reliability. Future ideal cell structure will also be addressed
Keywords :
cellular arrays; embedded systems; flash memories; integrated circuit reliability; memory architecture; aggressive scaling; cost effective device realization; device physics; embedded flash memories; ideal cell structure; process integration; reliability; system-on-a-chip; technology assessment; CMOS logic circuits; CMOS technology; Costs; Error correction codes; Flash memory; Logic devices; Random access memory; Roads; System-on-a-chip; Tunneling;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1999. International Symposium on
Conference_Location :
Taipei
Print_ISBN :
0-7803-5620-9
DOI :
10.1109/VTSA.1999.786030
