DocumentCode

3067057

Title

Prediction of Plasma Charging Induced Gate Oxide Tunneling Current and Antenna Dependence by Plasma Charging Probe

Author

Ma, Shawming ; McVittie, James P.

Author_Institution

Stanford University

fYear

1996

fDate

14-14 May 1996

Firstpage

20

Lastpage

23

Keywords

Antenna measurements; Current measurement; Distortion measurement; Plasma applications; Plasma measurements; Plasma sources; Probes; Resists; Tunneling; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Process-Induced Damage, 1996 1st International Symposium on

Conference_Location

Santa Clara, CA, USA

Print_ISBN

0-9651577-0-9

Type

conf

DOI

10.1109/PPID.1996.715194

Filename

715194