Title :
Minimization of spectral phase errors in spectrally resolved interferometry
Author :
A Joonho You ; Joo, B. Ki-Nam
Author_Institution :
INTEKPLUS Co., Ltd., Daejeon, South Korea
fDate :
June 30 2013-July 4 2013
Abstract :
We introduce and verify an iterative least squared phase shifting method, inherently insensitive to any types of phase shifting errors, to calculate the spectral phase in PS-SRI. In this presentation, a description of the method and its simulation results are presented.
Keywords :
iterative methods; least squares approximations; phase shifting interferometry; PS-SRI; iterative least squared phase shifting method; phase shifting errors; spectral phase errors; spectrally resolved interferometry; Interference; Iterative methods; Measurement uncertainty; Optical interferometry; Phase measurement; Phase shifting interferometry; Thickness measurement;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600586
