Title :
Two-dimensional MOS device modeling at low-temperature
Author :
Ghazavi, Parviz ; Ho, Fat Duen
Author_Institution :
Dept. of Electr. & Comput. Eng., Alabama Univ., Huntsville, AL, USA
Abstract :
Develops a two-dimensional numerical model for short-channel MOSFETs over a temperature range of 55-350 K. This model is equivalent to that of Selberherr. The simplification of Fermi-Dirac integrals for different temperature ranges is presented. Gummel´s conventional decoupled method is used for linearization of basic semiconductor equations. In conjunction with Gummel´s algorithm overrelaxation was used to speed up the convergence. A strongly implicit iterative method proposed by Stone was used to solve the nonlinear equations. The preliminary results for incorporating the simplified approximation for the Fermi-Dirac integrals into the MOS device modeling at low temperature are reported. These results include the ionized doping distributions, the threshold voltage, and the subthreshold characteristics of the device at low temperature, which are compared with those at room temperature
Keywords :
doping profiles; insulated gate field effect transistors; relaxation theory; semiconductor device models; 55 to 350 K; Fermi-Dirac integrals; Gummel´s conventional decoupled method; ionized doping distributions; linearization; nonlinear equations; overrelaxation; semiconductor equations; subthreshold characteristics; threshold voltage; two-dimensional numerical model; Convergence; Integral equations; Iterative algorithms; Iterative methods; MOS devices; MOSFETs; Nonlinear equations; Numerical models; Semiconductor process modeling; Temperature distribution;
Conference_Titel :
Southeastcon '92, Proceedings., IEEE
Conference_Location :
Birmingham, AL
Print_ISBN :
0-7803-0494-2
DOI :
10.1109/SECON.1992.202333