DocumentCode
3068974
Title
Carrier freeze-out in strained p-Si1-xGex layers
Author
Wan-Rong, Zhang ; Zhi-Guo, Li ; Jin-sheng, Luo ; Yao-hai, Cheng ; Chen Jian-xin ; Guang-Di, Shen
Author_Institution
Dept. of Electron. Eng., Beijing Polytech. Univ., China
fYear
1998
fDate
1998
Firstpage
780
Lastpage
783
Abstract
In this paper, the carrier freeze-out in strained p-Si1-x Gex layers grown on (001) substrates is studied analytically. It is found that as the Ge fraction increases, the valence effective density of states (NV)SiGe/(NV)Si normalized by that in Si decreases. Furthermore, as the temperature becomes lower, the decrease in (NV)SiGe/(NV)Si becomes more rapid. It is also show that as the Ge fraction increases, although it has little effect on the ionized doping concentration at room temperature, the ionized doping concentration increases at low temperatures compared with that in Si. This implies that carrier freeze-out is mitigated at low temperatures, which can have a beneficial effect on the operation of Si-xGex-based devices at low temperatures
Keywords
Ge-Si alloys; doping profiles; electronic density of states; semiconductor materials; Ge fraction; carrier freeze-out; ionized doping concentration; strained p-Si1-xGex layers; valence effective density of states; Aluminum alloys; Artificial intelligence; Equations; Gallium alloys; Germanium silicon alloys; Impurities; Lattices; Silicon alloys; Silicon germanium; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location
Beijing
Print_ISBN
0-7803-4306-9
Type
conf
DOI
10.1109/ICSICT.1998.786136
Filename
786136
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