Title :
Carrier freeze-out in strained p-Si1-xGex layers
Author :
Wan-Rong, Zhang ; Zhi-Guo, Li ; Jin-sheng, Luo ; Yao-hai, Cheng ; Chen Jian-xin ; Guang-Di, Shen
Author_Institution :
Dept. of Electron. Eng., Beijing Polytech. Univ., China
Abstract :
In this paper, the carrier freeze-out in strained p-Si1-x Gex layers grown on (001) substrates is studied analytically. It is found that as the Ge fraction increases, the valence effective density of states (NV)SiGe/(NV)Si normalized by that in Si decreases. Furthermore, as the temperature becomes lower, the decrease in (NV)SiGe/(NV)Si becomes more rapid. It is also show that as the Ge fraction increases, although it has little effect on the ionized doping concentration at room temperature, the ionized doping concentration increases at low temperatures compared with that in Si. This implies that carrier freeze-out is mitigated at low temperatures, which can have a beneficial effect on the operation of Si-xGex-based devices at low temperatures
Keywords :
Ge-Si alloys; doping profiles; electronic density of states; semiconductor materials; Ge fraction; carrier freeze-out; ionized doping concentration; strained p-Si1-xGex layers; valence effective density of states; Aluminum alloys; Artificial intelligence; Equations; Gallium alloys; Germanium silicon alloys; Impurities; Lattices; Silicon alloys; Silicon germanium; Temperature;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786136