DocumentCode
3070013
Title
Design of ZnO/SiO2/Si monolithic integrated programmable SAW filter
Author
Dazhong, Zhu ; Xiaoxia, Hun ; Wei, Guo
Author_Institution
Dept. of Inf. & Electr. Eng., Zhejiang Univ., Hangzhou, China
fYear
1998
fDate
1998
Firstpage
826
Lastpage
829
Abstract
In this paper the design of a ZnO/SiO2/Si monolithic integrated programmable SAW filter is suggested. The input SAW interdigital transducer (IDT) and tap delay lines (TDL) are fabricated on ZnO/SiO2 structure. A NMOS-DMOS sampling, weighting, controlling and summing integrated circuit is designed compatibly in SiO 2/Si structure. This IC can control the IDT and TDL by programmable weighting signal to realize the shift of the central frequency of bandpass of this SAW filter
Keywords
II-VI semiconductors; MOS integrated circuits; band-pass filters; elemental semiconductors; interdigital transducers; monolithic integrated circuits; silicon; silicon compounds; surface acoustic wave delay lines; surface acoustic wave filters; surface acoustic wave transducers; zinc compounds; NMOS-DMOS sampling circuit; ZnO-SiO2-Si; bandpass central frequency; interdigital transducer; monolithic integrated programmable SAW filter; programmable weighting; summing integrated circuit; tap delay lines; Acoustic waves; Bonding; Conductivity; Frequency; Packaging; Piezoelectric materials; SAW filters; Substrates; Surface acoustic wave devices; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location
Beijing
Print_ISBN
0-7803-4306-9
Type
conf
DOI
10.1109/ICSICT.1998.786192
Filename
786192
Link To Document