• DocumentCode
    3070013
  • Title

    Design of ZnO/SiO2/Si monolithic integrated programmable SAW filter

  • Author

    Dazhong, Zhu ; Xiaoxia, Hun ; Wei, Guo

  • Author_Institution
    Dept. of Inf. & Electr. Eng., Zhejiang Univ., Hangzhou, China
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    826
  • Lastpage
    829
  • Abstract
    In this paper the design of a ZnO/SiO2/Si monolithic integrated programmable SAW filter is suggested. The input SAW interdigital transducer (IDT) and tap delay lines (TDL) are fabricated on ZnO/SiO2 structure. A NMOS-DMOS sampling, weighting, controlling and summing integrated circuit is designed compatibly in SiO 2/Si structure. This IC can control the IDT and TDL by programmable weighting signal to realize the shift of the central frequency of bandpass of this SAW filter
  • Keywords
    II-VI semiconductors; MOS integrated circuits; band-pass filters; elemental semiconductors; interdigital transducers; monolithic integrated circuits; silicon; silicon compounds; surface acoustic wave delay lines; surface acoustic wave filters; surface acoustic wave transducers; zinc compounds; NMOS-DMOS sampling circuit; ZnO-SiO2-Si; bandpass central frequency; interdigital transducer; monolithic integrated programmable SAW filter; programmable weighting; summing integrated circuit; tap delay lines; Acoustic waves; Bonding; Conductivity; Frequency; Packaging; Piezoelectric materials; SAW filters; Substrates; Surface acoustic wave devices; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    0-7803-4306-9
  • Type

    conf

  • DOI
    10.1109/ICSICT.1998.786192
  • Filename
    786192