• DocumentCode
    3071960
  • Title

    Some recent developments of vacuum arc ion sources

  • Author

    Oks, E. ; Brown, I.

  • Author_Institution
    High Current Electronics Institute, Russian Academy of Sciences, Tomsk, 634055 Russia
  • Volume
    2
  • fYear
    2004
  • fDate
    Sept. 27 2004-Oct. 1 2004
  • Firstpage
    527
  • Lastpage
    532
  • Abstract
    We review some recent experimental results and ongoing developments of vacuum-arc-based high current metal ion source. These include enhancement of ion charge states, alternative triggering of vacuum arc, and reduction of ion beam noise, increased pulse stability, and generation of gaseous ions.
  • Keywords
    Cathodes; Ion beams; Ion sources; Particle beams; Plasma applications; Plasma sources; Pulse shaping methods; Shape; Surface discharges; Vacuum arcs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
  • Conference_Location
    Yalta, Crimea
  • ISSN
    1093-2941
  • Print_ISBN
    0-7803-8461-X
  • Type

    conf

  • DOI
    10.1109/DEIV.2004.1422667
  • Filename
    1422667