DocumentCode
3072121
Title
Novel plasma generation devices based on the plasma lens
Author
Goncharov, A. ; Brown, I.
Author_Institution
Institute of Physics NASU, 46 pr Nauki, Kiev 03028, Ukraine
Volume
2
fYear
2004
fDate
Sept. 27 2004-Oct. 1 2004
Firstpage
554
Lastpage
556
Abstract
We describe some novel plasma devices based on the electrostatic plasma lens configuration and plasma optics principles. These low cost, high reliability, low maintenance devices can be used for manipulating heavy ion beams in a number of different applications for ion treatment and material surface modification.
Keywords
Electrostatics; Ion beams; Lenses; Magnetic fields; Particle beams; Plasma accelerators; Plasma applications; Plasma devices; Plasma immersion ion implantation; Plasma materials processing;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
Conference_Location
Yalta, Crimea
ISSN
1093-2941
Print_ISBN
0-7803-8461-X
Type
conf
DOI
10.1109/DEIV.2004.1422674
Filename
1422674
Link To Document