• DocumentCode
    3072719
  • Title

    Research on the effect of inorganic components on brightener in horizontal pulse plating solution by Cyclic Voltammetric Stripping method

  • Author

    Minjie Ning ; Wei He ; Xianzhong Tang ; Zhihua Tao ; Xuemei He ; Lin Xiang ; Yongshuan Hu ; Xinhong Su ; Shigang Cheng

  • Author_Institution
    Inst. of Microelectron. & Solid State Electron., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
  • fYear
    2012
  • fDate
    24-26 Oct. 2012
  • Firstpage
    333
  • Lastpage
    336
  • Abstract
    The effect of Fe3+, Cu2+ and Cl- with different concentration on the electro-deposition process of Cu in the medium of CuSO4-H2SO4 with platinum as work electrode has been studied by CVS (Cyclic Voltammetric Stripping) method and the assay value of brightener is also studied. The research results show that different concentration of Fe3+, Cu2+ and CL- affects the assay value of brightener to some extent, the brightener´s extreme concentration value change are RFe3+=10.33ml/l, RCL-=1.22ml/l, RCu2+=3.1ml/l respectively, the concentration of Fe3+ has the greatest influence on brightener concentration measurement. So, the effect of Fe3+ should be taken into consideration with CVS analyzer to monitor the concentration of brightener in electroplating solution. The study result is of some reference and guiding significance for the electroplating liquid composition control and production process.
  • Keywords
    electroplating; brightener concentration measurement; cyclic voltammetric stripping method; electrodeposition process; electroplating liquid composition control; electroplating solution; horizontal pulse plating solution; inorganic components; production process; Additives; Argon; Copper; Electrodes; Monitoring; Platinum; Production; Brightener; CVS; Electroplating liquid; Organic additives;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2012 7th International
  • Conference_Location
    Taipei
  • ISSN
    2150-5934
  • Print_ISBN
    978-1-4673-1635-4
  • Electronic_ISBN
    2150-5934
  • Type

    conf

  • DOI
    10.1109/IMPACT.2012.6420216
  • Filename
    6420216