System identification and control for ASU´s molecular beam epitaxy (MBE) machines

Author

Grassi, Elena ; Metzger, Richard P. ; Johnson, Shane ; Tsakalis, Kostas S. ; Zhang, Yong-Hang ; Rodriguez, Armando A.

Author_Institution

Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA

Volume

6

fYear

1999

fDate

1999

Firstpage

4568

Abstract

This paper describes how experimentally derived data and standard system identification methods have been used to obtain useful continuous time models for molecular beam epitaxy machines residing at Arizona State University (ASU). Two linear time invariant dynamical models are presented which describe the the input-output map between heater power and substrate temperature. A control law based on the simpler model is proposed. Future directions are also discussed

Keywords

continuous time systems; identification; linear systems; molecular beam epitaxial growth; process control; semiconductor device manufacture; Arizona State University; continuous time models; heater power; input-output map; linear time invariant dynamical models; molecular beam epitaxy machines; substrate temperature; system identification; Control systems; Molecular beam applications; Molecular beam epitaxial growth; Molecular beams; Power system modeling; Semiconductor process modeling; Signal processing; Substrates; System identification; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 1999. Proceedings of the 1999

Conference_Location

San Diego, CA

ISSN

0743-1619

Print_ISBN

0-7803-4990-3

Type

conf

DOI

10.1109/ACC.1999.786456

Filename

786456