Title :
Design and fabrication for inertial micro sensors
Author :
Wu, Guoying ; Xiao, Zhixiong ; Li, Zhihong ; Hao, Yilong
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated
Keywords :
accelerometers; gyroscopes; micromachining; microsensors; accelerometer; design; fabrication; gyroscope; inertial micro sensors; micromachining technology; Acceleration; Accelerometers; Design automation; Fabrication; Frequency; Gyroscopes; Microelectronics; Micromachining; Micromechanical devices; Resonance;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786512
