DocumentCode
3075215
Title
Design and fabrication for inertial micro sensors
Author
Wu, Guoying ; Xiao, Zhixiong ; Li, Zhihong ; Hao, Yilong
Author_Institution
Inst. of Microelectron., Peking Univ., Beijing, China
fYear
1998
fDate
1998
Firstpage
903
Lastpage
909
Abstract
This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated
Keywords
accelerometers; gyroscopes; micromachining; microsensors; accelerometer; design; fabrication; gyroscope; inertial micro sensors; micromachining technology; Acceleration; Accelerometers; Design automation; Fabrication; Frequency; Gyroscopes; Microelectronics; Micromachining; Micromechanical devices; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location
Beijing
Print_ISBN
0-7803-4306-9
Type
conf
DOI
10.1109/ICSICT.1998.786512
Filename
786512
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