Thermally excited micromechanical vacuum resonator

Author

Yaqiang, Wang ; Zhonghe, Jin ; Yuelin, Wang ; Chun, Ding

Author_Institution

Dept. of Inf. & Electron. Eng., Zhejiang Univ., Hangzhou, China

fYear

1998

fDate

1998

Firstpage

950

Lastpage

952

Abstract

A micromechanical resonator is proposed and realized. It consists of a single-crystal silicon beam and two P-type silicon resistors. One resistor is used to excite the vibrating beam and the other to sense vibration of the beam. The dimensions of the resonator are about 4×2.5 mm², the resonant frequency is about 7.8 KHz, Q factor about 190 in air and above 2500 in vacuum degree of 7.5×10 ^-4 Pa. The theory of thermal excitation is analyzed and the characteristics of the resonator are tested. We conclude that the resonator can be applied to vacuum measurement by the means of closed-loop resonating circuit. The design and realization of the circuit are described

Keywords

etching; frequency response; micromachining; micromechanical resonators; microsensors; vacuum measurement; vibrations; 2.5 mm; 4 mm; 7.5E-4 Pa; 7.8 kHz; P-type silicon resistors; Q factor; Si; anisotropic etching; cantilever beam; closed-loop resonating circuit; frequency response; micromechanical vacuum resonator; process flow; single-crystal silicon beam; thermally excited; vacuum measurement; Circuits; Etching; Fluid flow measurement; Frequency measurement; Heating; Lithography; Micromechanical devices; Q factor; Resistors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on

Conference_Location

Beijing

Print_ISBN

0-7803-4306-9

Type

conf

DOI

10.1109/ICSICT.1998.786540

Filename

786540