Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Author

Chun, Ding ; Yaqiang, Wang ; Wang-Yuelin ; Zhonghe, Jin

Author_Institution

Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China

fYear

1998

fDate

23-23 Oct. 1998

Firstpage

953

Lastpage

956

Abstract

A flow-sensor and a resonator are fabricated on silicon substrate using the micromechanical technology. The devices are with a structure based on a silicon cantilever with waveguide on the surface to detect the movement of the silicon cantilever. The method to couple the laser into the waveguide is discussed and the performance of the fabricated devices are characterized.

Keywords

elemental semiconductors; flowmeters; micro-optics; micromachining; micromechanical resonators; microsensors; optical couplers; optical planar waveguides; pressure sensors; silicon; Si; V-grooves; device performance; flow-sensor; frequency response; laser coupling method; micromachining; optical-coupling; optical-type micromechanical sensors; resonator; silicon cantilever; surface waveguide; Micromechanical devices; Optical beams; Optical coupling; Optical crosstalk; Optical interferometry; Optical resonators; Optical sensors; Optical surface waves; Silicon; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on

Conference_Location

Beijing, China

Print_ISBN

0-7803-4306-9

Type

conf

DOI

10.1109/ICSICT.1998.786542

Filename

786542