Title :
Discussion on the optical-coupling in silicon optical-type micromechanical sensors
Author :
Chun, Ding ; Yaqiang, Wang ; Wang-Yuelin ; Zhonghe, Jin
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
A flow-sensor and a resonator are fabricated on silicon substrate using the micromechanical technology. The devices are with a structure based on a silicon cantilever with waveguide on the surface to detect the movement of the silicon cantilever. The method to couple the laser into the waveguide is discussed and the performance of the fabricated devices are characterized.
Keywords :
elemental semiconductors; flowmeters; micro-optics; micromachining; micromechanical resonators; microsensors; optical couplers; optical planar waveguides; pressure sensors; silicon; Si; V-grooves; device performance; flow-sensor; frequency response; laser coupling method; micromachining; optical-coupling; optical-type micromechanical sensors; resonator; silicon cantilever; surface waveguide; Micromechanical devices; Optical beams; Optical coupling; Optical crosstalk; Optical interferometry; Optical resonators; Optical sensors; Optical surface waves; Silicon; Surface waves;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing, China
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786542
