One-dimensional non-contact PSD with high performance

Author

Huaping, Ge ; Wenfu, Dong ; Dexin, Wu

Author_Institution

Microelectron. R&D Center, Acad. Sinica, Beijing, China

fYear

1998

fDate

1998

Firstpage

957

Lastpage

960

Abstract

A one-dimensional noncontact Position Sensing Detector (PSD) with a new type structure has been investigated. The structure is different from that of the conventional PSD. Experiments show that the detector has a high degree of linearity and high sensitivity. Typical test results of our 1×6 mm² PSD device are: position resolution (minimum light spot displacement that can be detected) is extremely good and has been proven to be 3×10^-7 m; response time τ_r is about 10 μs; photoelectric sensitivity is as high as 0.45 A/W; dark current of the device is about 10^-9 A and the device has a high degree of linearity within the spectrum range from 720 nm to 1190 nm. Also, the fabrication processes and working circuit of the device are described

Keywords

photodetectors; photodiodes; position measurement; 1D noncontact position sensing detector; 720 to 1190 nm; dark current; fabrication process; high degree of linearity; high sensitivity; lateral photo-effect; lateral photodiode; photoelectric sensitivity; position resolution; Contact resistance; Delay; Detectors; Diodes; Distortion measurement; Electrodes; Equivalent circuits; Linearity; Photoconductivity; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on

Conference_Location

Beijing

Print_ISBN

0-7803-4306-9

Type

conf

DOI

10.1109/ICSICT.1998.786545

Filename

786545