Title :
One-dimensional non-contact PSD with high performance
Author :
Huaping, Ge ; Wenfu, Dong ; Dexin, Wu
Author_Institution :
Microelectron. R&D Center, Acad. Sinica, Beijing, China
Abstract :
A one-dimensional noncontact Position Sensing Detector (PSD) with a new type structure has been investigated. The structure is different from that of the conventional PSD. Experiments show that the detector has a high degree of linearity and high sensitivity. Typical test results of our 1×6 mm2 PSD device are: position resolution (minimum light spot displacement that can be detected) is extremely good and has been proven to be 3×10-7 m; response time τr is about 10 μs; photoelectric sensitivity is as high as 0.45 A/W; dark current of the device is about 10-9 A and the device has a high degree of linearity within the spectrum range from 720 nm to 1190 nm. Also, the fabrication processes and working circuit of the device are described
Keywords :
photodetectors; photodiodes; position measurement; 1D noncontact position sensing detector; 720 to 1190 nm; dark current; fabrication process; high degree of linearity; high sensitivity; lateral photo-effect; lateral photodiode; photoelectric sensitivity; position resolution; Contact resistance; Delay; Detectors; Diodes; Distortion measurement; Electrodes; Equivalent circuits; Linearity; Photoconductivity; Testing;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786545
