Title :
Mid-infrared suspended membrane waveguides on silicon-on-insulator
Author :
Cheng, Zhenzhou ; Chen, Xia ; Wong, C.Y. ; Xu, Ke ; Fung, Christy K Y ; Chen, Y.M. ; Tsang, Hon Ki
Author_Institution :
Dept. of Electron. Eng., Chinese Univ. of Hong Kong, Hong Kong, China
Abstract :
We describe a platform for mid-infrared silicon photonic devices based on focusing subwavelength grating coupler (SWG) and suspended membrane waveguides. The focusing SWG was designed for 2.75 μm wavelength. 24.7% coupling efficiency was measured. The suspended membrane waveguide was optimized in terms of holes size and etch depth.
Keywords :
diffraction gratings; infrared spectra; nanophotonics; optical couplers; optical waveguides; silicon-on-insulator; Si; efficiency 24.7 percent; focusing SWG; mid-infrared silicon photonic devices; mid-infrared suspended membrane waveguides; silicon-on-insulator; subwavelength grating coupler; wavelength 2.75 mum; Biomembranes; Couplings; Focusing; Gratings; Optical waveguides; Scanning electron microscopy; Silicon;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
DOI :
10.1109/OECC.2012.6276468
