Title :
Segregation Structure Of Bias-sputtered CoCr/Cr And CoCrTa/Cr Films
Author :
Okumura, Y. ; Morita, H. ; Fujimori, H. ; Yang, X.B. ; Endo, I.
Author_Institution :
KUBOTA Corp., Hard Disk Division, Itami, Hyogo 664, Japan
Keywords :
Chromium alloys; Coercive force; Magnetic films; Magnetic properties; Scanning electron microscopy; Sputter etching; Sputtering; Substrates; Surface morphology; Voltage;
Conference_Titel :
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location :
Stockhom, Sweden
Print_ISBN :
0-7803-1310-0
DOI :
10.1109/INTMAG.1993.642042