Title :
Sol-gel PZT thick films for ultrasonic imaging
Author :
Lukacs, M. ; Sayer, M. ; Knapik, D.A. ; Candela, R. ; Foster, F.S.
Author_Institution :
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Abstract :
Ultrasound transducers for B-mode medical imaging are typically operated between 1 and 10 MHz. Research has been directed towards developing transducers that are sensitive in the 10-100 MHz range because a number of clinical problems require higher resolution than can be achieved at the lower frequencies. Using a modified sol-gel technique developed at Queen´s University, lead zirconate titanate (PZT) thin films of 45±5 μm in thickness have been successfully coated on aluminum foil. The technique allows the fabrication of thin films of arbitrary thickness in the range of 1 to 60 μm. This PZT provides an alternative transducer material in the 10-100 MHz range and may also produce sensitive transducers operating above 100 MHz. This will increase the available resolution of ultrasound backscatter microscopy and narrows the gap between lower resolution clinical systems and high resolution transmission scanning acoustic microscopy. The evaluation of the electrical and mechanical properties of these PZT films and the ability to pattern them are described
Keywords :
biomedical ultrasonics; lead compounds; piezoceramics; sol-gel processing; thick films; ultrasonic transducers; 1 to 100 MHz; 1 to 60 mum; Al; B-mode medical imaging; Queen´s University; aluminum foil; arbitrary thickness films; clinical problems; high resolution transmission scanning acoustic microscopy; lead zirconate titanate; lower resolution clinical systems; mechanical properties; medical diagnostic imaging; sensitive transducers; sol-gel PZT thick films; ultrasonic imaging; ultrasound backscatter microscopy; Acoustic transducers; Biomedical imaging; Biomedical transducers; Frequency; Microscopy; Thick films; Titanium compounds; Transistors; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Engineering in Medicine and Biology Society, 1995., IEEE 17th Annual Conference
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-2475-7
DOI :
10.1109/IEMBS.1995.575277