Title :
[Copyright notice]
Abstract :
The following topics are dealt with: fabrication technology; distributed MEMS; planar micromanipulator; stack-integrated microactuator; sensor array; acoustic impedance control; FPGA; distributed control operator; cantilever arrays; semidecentralized approximation; optimal control; analog computing; load-balanced routing scheme; and NoC-based systems-on-chip.
Keywords :
approximation theory; cantilevers; distributed control; electric impedance; field programmable gate arrays; manipulators; micromechanical devices; micromechanics; network-on-chip; optimal control; resource allocation; sensor arrays; FPGA; NoC-based systems-on-chip; acoustic impedance control; analog computing; cantilever array; distributed MEMS; distributed control operator; fabrication technology; load-balanced routing scheme; optimal control; planar micromanipulator; semidecentralized approximation; sensor array; stack-integrated microactuator;
Conference_Titel :
Hardware and Software Implementation and Control of Distributed MEMS (DMEMS), 2010 First Workshop on
Conference_Location :
Besancon
Print_ISBN :
978-1-4244-7222-2
DOI :
10.1109/dMEMS.2010.3
