Title :
A Model of Two-Dimensional Array of Cantilevers and Its Validation
Author :
Lenczner, M. ; Su, S. ; Hui, H.
Author_Institution :
FEMTO-ST, Temps-Frequences Univ. de Franche-Comte, Besancon, France
Abstract :
We present a model for two-dimensional arrays of micro-cantilevers in elasto-dynamical regime. It has been derived by a two-scale approximation method related to strongly heterogeneous system. We also report validation results regarding its modal structure compared with the one of a direct Finite Element Model (FEM).
Keywords :
Approximation methods; Atomic force microscopy; Convergence; Distributed control; Finite element methods; Hardware; Laboratories; Micromechanical devices; Microstrip; Numerical simulation; Cantilever Arrays; Homogenization; Modal Validation; Multiscale Modeling;
Conference_Titel :
Hardware and Software Implementation and Control of Distributed MEMS (DMEMS), 2010 First Workshop on
Conference_Location :
Besan, TBD, France
Print_ISBN :
978-1-4244-7222-2
Electronic_ISBN :
978-1-4244-7223-9
DOI :
10.1109/dMEMS.2010.14
