Thick film sol gel PZT transducer using dip coating

Author

Gentry, Kenneth L. ; Zara, Jason M. ; Bu, Sang-Don ; Eom, Chang-Beom ; Smith, Stephen W.

Author_Institution

Dept. of Biomed. Eng., Duke Univ., Durham, NC, USA

Volume

2

fYear

2000

fDate

36800

Firstpage

977

Abstract

A sol gel process has been used to develop a 30 μm thick PZT coating on a sapphire wafer. The sol gel film was removed and plated with platinum electrodes. The free-standing film had a free dielectric constant (ε^T) of 820, a thickness-mode coupling coefficient (k_t) of 0.17, a speed of sound (c) of 3700 m/s, and an acoustic impedance (Z) of 28.9 MRayls. The film resonated at 62 MHz. These results were similar to KLM simulation results. A sol gel transducer was built by first backing the film with 2.2 mm thick silver epoxy. The transducer resonated at 32, 64, and 92 MHz. At 32 MHz, the transducer had a bandwidth of 40%. The insertion loss at 47 MHz was -66 dB. A 32 MHz image was constructed with this transducer by off-line processing of 40 rf-lines of data

Keywords

acoustic impedance; biomedical transducers; biomedical ultrasonics; lead compounds; permittivity; piezoceramics; piezoelectric transducers; sol-gel processing; thick films; ultrasonic transducers; 30 micron; 32 to 92 MHz; KLM simulation; PZT; PZT coating; PbZrO3TiO3; US imaging; US transducer; acoustic impedance; dip coating; free dielectric constant; freestanding film; impulse response; insertion loss; off-line processing; platinum electrodes; pulse-echo mode; sapphire wafer; speed of sound; thick film sol gel process; thickness-mode coupling coefficient; Acoustic transducers; Bandwidth; Dielectric constant; Dip coating; Electrodes; Impedance; Insertion loss; Platinum; Silver; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2000 IEEE

Conference_Location

San Juan

ISSN

1051-0117

Print_ISBN

0-7803-6365-5

Type

conf

DOI

10.1109/ULTSYM.2000.921488

Filename

921488