DocumentCode
3077384
Title
Sol-gel PTC BaTiO3 thin films: application of PTC film to heater plate
Author
Ogawa, T. ; Sugiyama, O. ; Saitoh, S. ; Miyahara, S. ; Akahori, A. ; Yajima, M. ; Masuda, H. ; Satoh, K. ; Satoh, H. ; Kobayashi, M. ; Nozaki, K.
Author_Institution
Shizuoka Inst. of Sci. & Technol., Fukuroi, Japan
fYear
1998
fDate
1998
Firstpage
101
Lastpage
104
Abstract
PTC BaTiO3 (BT) thin films were fabricated to apply to a heater plate. BT sol solutions composed of barium acetate and titanium-tetrabutoxide were prepared in a mixture of glycerine, methanol and acetic acid. The small amounts of donor (La), acceptor (Mn) and sintering aid (Si) were added to the BT sol solutions. In this study, we found out that the fabrication conditions of the sol-gel PTC BT thin films for heater devices were as follows: (1) the sol compositions available for PTC films, (2) the substrates which don´t react with the films such as high purity BT ceramics, (3) relatively high firing temperatures to crystallize the tetragonal phase, (4) coarse grains (20-80 μm), and (5) the film thickness of 2-4 μm for the film heaters which showed high response to temperature change and uniform heating
Keywords
barium compounds; ferroelectric ceramics; ferroelectric thin films; grain size; lanthanum; manganese; silicon; sintering; sol-gel processing; 2 to 4 mum; 20 to 80 mum; BaTiO3:La,Mn,Si; La; Mn; PTC film; Si; acceptor; acetic acid; barium acetate; coarse grains; donor; film thickness; firing temperatures; glycerine; heater plate; high purity BT ceramics; methanol; sintering aid; sol solutions; sol-gel PTC BT thin films; sol-gel PTC BaTiO3 thin films; tetragonal phase; titanium-tetrabutoxide; Barium; Ceramics; Crystallization; Fabrication; Firing; Methanol; Substrates; Temperature; Thin film devices; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location
Montreux
ISSN
1099-4734
Print_ISBN
0-7803-4959-8
Type
conf
DOI
10.1109/ISAF.1998.786646
Filename
786646
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