DocumentCode
3077736
Title
Preparation of La-modified Sr0.5Ba0.5Nb2 O6 ferroelectric thin films for dielectric-bolometer-based infrared image sensor
Author
Xu, H. ; Kubo, R. ; Yoshino, Y. ; Hashimoto, K. ; Noda, M. ; Okuyama, M.
Author_Institution
Graduate Sch. of Eng. Sci., Osaka Univ., Japan
fYear
1998
fDate
1998
Firstpage
175
Lastpage
178
Abstract
Infrared sensitivity performances of ferroelectric bolometer have been evaluated from the principle point of view. La-modified Sr0.5 Ba0.5Nb2O6 (SBN) films have been prepared on Pt/Ti/SiO2/Si by pulsed laser deposition with a special reference to develop dielectric-bolometer-based thermal image array sensors. (001)-oriented Sr0.48Ba0.51La0.01Nb2O6 , and Sr0.5Ba0.5Nb2O6:2%La2 O3 films were obtained when using ambient N2O, both the films have slim P-E hysteresis loops at room temperature. Typically for Sr0.48Ba0.51La0.01 Nb2O6, the dielectric constant increases at an average rate of 60 K-1 in the range of 30°C-50°C
Keywords
barium compounds; bolometers; ferroelectric devices; ferroelectric materials; ferroelectric thin films; infrared detectors; lanthanum; pulsed laser deposition; strontium compounds; 30 to 50 C; La-modified Sr0.5Ba0.5Nb2O6 ferroelectric thin films; Sr0.48Ba0.51La0.01Nb2 O6; Sr0.5Ba0.5Nb2O6:2%La 2O3; Sr0.5Ba0.5Nb2O6:La 2O3; dielectric constant; dielectric-bolometer-based infrared image sensor; pulsed laser deposition; slim P-E hysteresis loops; thermal image array sensors; Bolometers; Ferroelectric films; Ferroelectric materials; Niobium; Optical pulses; Performance evaluation; Pulsed laser deposition; Semiconductor films; Sensor arrays; Strontium;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location
Montreux
ISSN
1099-4734
Print_ISBN
0-7803-4959-8
Type
conf
DOI
10.1109/ISAF.1998.786664
Filename
786664
Link To Document