Title :
Surface acoustic wave liquid sensor using dual mode delay line
Author :
Nomura, T. ; Uchiyama, M. ; Saitoh, A. ; Furukawa, S.
Author_Institution :
Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A new surface acoustic wave (SAW) liquid sensor system is described. SAW devices offer many attractive features for applications as sensors. In this paper two surface acoustic waves having shear horizontal (SH mode) and shear vertical (R mode) displacement have been used for measuring the acoustic properties of liquids. SH and R mode SAW delay lines were constructed on a 36° YX LiTaO3 substrate. The SH mode SAW was excited in the X direction and the R mode SAW was excited in the direction at 90° to X on the substrate by an interdigital transducer (IDT). The measurements of the acoustic properties of liquids were performed for water/glycerol mixtures. The experimental results show that the velocity of the SH and R mode SAW depend on the viscosity and the density of the loaded mixtures, respectively. These results indicate that the dual mode SAW sensor is very suitable for determining the acoustic properties of liquids
Keywords :
acoustic variables measurement; surface acoustic wave sensors; viscosity measurement; LiTaO3; LiTaO3 substrate; density; dual mode delay line; shear horizontal displacement; shear vertical displacement; surface acoustic wave liquid sensor; viscosity; water/glycerol mixtures; Acoustic measurements; Acoustic sensors; Acoustic waves; Delay lines; Displacement measurement; Liquids; Sensor phenomena and characterization; Sensor systems; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786690
