Title :
Formation and microstructure of ferroelectric lead lanthanum zirconate titanate thick film
Author :
Ichiki, M. ; Akedo, J. ; Schroth, A. ; Morikawa, Y. ; Maeda, R. ; Ishikawa, Y.
Author_Institution :
Mech. Eng. Lab., AIST, Ibaraki, Japan
Abstract :
This paper reports the thick film formation of lead lanthanum zirconate titanate using a gas-deposition method from its ultra-fine particle condition. This fabrication method has been developed recently as a useful technology for smart microelectromechanical systems. Thick films up to 10 μm were produced. Scanning electron microscopy observation of the film surfaces was carried out. Each particle has a clear grain boundary. This means a kind of firing or boundary fusion seemed to be occurring in the formation process. In this study we clarified that the size of the particle would be one of the important factors affecting the film characteristics
Keywords :
ferroelectric materials; grain boundaries; lead compounds; particle size; scanning electron microscopy; 10 mum; PZT; PbZrO3TiO3; gas-deposition method; grain boundary; particle size; scanning electron microscopy; thick film; ultra-fine particle; Actuators; Fabrication; Ferroelectric materials; Lanthanum; Microstructure; Scanning electron microscopy; Sputtering; Surface morphology; Thick films; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786751
