Title :
Design of optimized SOI slot waveguides for homogeneous optical sensing in near infrared
Author :
De Leonardis, Francesco ; Giannoccaro, Giovanni ; Troia, Benedetto ; Passaro, Vittorio M N ; Perri, Anna Gina
Author_Institution :
Dipt. di Ing. dell´´Ambiente e per lo Sviluppo Sostenibile, Politec. di Bari, Taranto, Italy
Abstract :
In this paper a detailed investigation of slot waveguides for optical sensing in near-IR wavelength region is carried out, assuming Silicon-on-Insulator technology. Optimized guided-wave structures are found in terms of high sensitivity (Sh) and low propagation losses (αprop) and design guidelines are clearly selected. A number of possible application fields for environmental monitoring are covered, including gas sensing (gas identification or measure of their physical parameters as pressure) and liquid sensing (as pollutants in water). Influence of fabrication tolerances and wavelength dependence are also studied.
Keywords :
infrared detectors; optical sensors; silicon-on-insulator; slot lines; SOI slot waveguide; Si; environmental monitoring; gas sensor; guided-wave structure optimization; homogeneous optical sensor; liquid sensor; near infrared wavelength region; silicon-on-insulator slot waveguide; Photonics; Silicon; Surface waves; Wires;
Conference_Titel :
Advances in Sensors and Interfaces (IWASI), 2011 4th IEEE International Workshop on
Conference_Location :
Savelletri di Fasano
Print_ISBN :
978-1-4577-0623-3
Electronic_ISBN :
978-1-4577-0622-6
DOI :
10.1109/IWASI.2011.6004705
