Design of optimized SOI slot waveguides for homogeneous optical sensing in near infrared

Author

De Leonardis, Francesco ; Giannoccaro, Giovanni ; Troia, Benedetto ; Passaro, Vittorio M N ; Perri, Anna Gina

Author_Institution

Dipt. di Ing. dell´´Ambiente e per lo Sviluppo Sostenibile, Politec. di Bari, Taranto, Italy

fYear

2011

fDate

28-29 June 2011

Firstpage

142

Lastpage

147

Abstract

In this paper a detailed investigation of slot waveguides for optical sensing in near-IR wavelength region is carried out, assuming Silicon-on-Insulator technology. Optimized guided-wave structures are found in terms of high sensitivity (S_h) and low propagation losses (α_prop) and design guidelines are clearly selected. A number of possible application fields for environmental monitoring are covered, including gas sensing (gas identification or measure of their physical parameters as pressure) and liquid sensing (as pollutants in water). Influence of fabrication tolerances and wavelength dependence are also studied.

Keywords

infrared detectors; optical sensors; silicon-on-insulator; slot lines; SOI slot waveguide; Si; environmental monitoring; gas sensor; guided-wave structure optimization; homogeneous optical sensor; liquid sensor; near infrared wavelength region; silicon-on-insulator slot waveguide; Photonics; Silicon; Surface waves; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Advances in Sensors and Interfaces (IWASI), 2011 4th IEEE International Workshop on

Conference_Location

Savelletri di Fasano

Print_ISBN

978-1-4577-0623-3

Electronic_ISBN

978-1-4577-0622-6

Type

conf

DOI

10.1109/IWASI.2011.6004705

Filename

6004705