MEMS switch for wireless communication circuits: fabrication process and simulation

This paper describes the process and methodology adopted for the design of a MEMS (micro electro mechanical system) switch in coplanar microstrip lines. The design proposed in this paper is the metallic bridge over a coplanar microstrip line suspended in both sides by two metallic posts. These MEMS switches are designed for operation at S band satisfying the implementation requirements for Bluetooth and WLAN systems giving the possibility of operation in two protocols: IEEE 802.11b up to 11 Mb/s bit rate (commonly named Wi-Fi) and 802.11g up to 54 Mb/s, recently approved with significant rise in data rate when compared to the 802.11b. The S parameters and electromechanical displacement simulations are also presented.