Title :
Fabrication of black silicon by using RIE texturing process as metal mesh
Author :
Kong, Daeyoung ; Oh, Junghwa ; Jeon, Seongchan ; Kim, Bonghwan ; Cho, Chanseob ; Lee, Jonghyun
Author_Institution :
Sch. of Electron. Eng., Kyungpook Nat. Univ., Daegu, South Korea
Abstract :
The reduction of optical losses in crystalline silicon solar cell by surface texturing is a critical process to improve the efficiency. We have changed the nonocolumn structure on the micrometer pyramidal structure by RIE texturing.
Keywords :
elemental semiconductors; optical losses; silicon; solar cells; sputter etching; surface texture; RIE texturing; Si; black silicon; metal mesh; micrometer pyramidal structure; nonocolumn structure; optical losses; solar cell; surface texturing; Conferences;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
DOI :
10.1109/OECC.2012.6276797
