DocumentCode

3085180

Title

The Hardness Of Iron(n) Films Sputtered In AR-N2 Mixtures

Author

Jones, R.E. ; White, R.L. ; Williams, J.L. ; Qian, X-W.

Author_Institution

Adstar-IBM, San Jose, CA 95193, USA

fYear

1993

fDate

13-16 April 1993

Keywords

Iron; Nitrogen; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1993. INTERMAG '93., Digest of International

Conference_Location

Stockhom, Sweden

Print_ISBN

0-7803-1310-0

Type

conf

DOI

10.1109/INTMAG.1993.642113

Filename

642113