Title :
The Hardness Of Iron(n) Films Sputtered In AR-N2 Mixtures
Author :
Jones, R.E. ; White, R.L. ; Williams, J.L. ; Qian, X-W.
Author_Institution :
Adstar-IBM, San Jose, CA 95193, USA
Keywords :
Iron; Nitrogen; Radio frequency;
Conference_Titel :
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location :
Stockhom, Sweden
Print_ISBN :
0-7803-1310-0
DOI :
10.1109/INTMAG.1993.642113
