• DocumentCode
    3086434
  • Title

    3-D biomimetic hair sensors and actuators

  • Author

    Najafi, Khalil

  • Author_Institution
    Center for Wireless Integrated MicroSensing & Syst. (WIMS2), Univ. of Michigan, Ann Arbor, MI, USA
  • fYear
    2013
  • fDate
    9-11 Dec. 2013
  • Abstract
    Nature and biology utilize a variety of structures, materials, and schemes to achieve excellent sensing performance with extreme reliability and robustness. One structure used more commonly in nature is the “hair”. Hair-like sensors and actuators are used for acoustic, chemical, flow, pressure, and gas sensing, among others. Hair-like actuators and passive structures are also used for thermal management, filtering, fluid flow control, etc. This paper discusses opportunities and approaches for developing hair-like biomimetic structures for sensing and actuation.
  • Keywords
    acoustic devices; biosensors; chemical sensors; flow sensors; gas sensors; microactuators; microsensors; pressure sensors; reliability; thermal management (packaging); 3D biomimetic hair actuator; 3D biomimetic hair sensor; Hair-like actuators; acoustic sensor; chemical sensor; flow sensor; gas sensing; hair-like biomimetic structures; passive structure; pressure sensor; reliability; robustness; thermal management; Hair; Mechanical sensors; Sensitivity; Sensor arrays; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2013 IEEE International
  • Conference_Location
    Washington, DC
  • Type

    conf

  • DOI
    10.1109/IEDM.2013.6724585
  • Filename
    6724585