Title :
3-D biomimetic hair sensors and actuators
Author_Institution :
Center for Wireless Integrated MicroSensing & Syst. (WIMS2), Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Nature and biology utilize a variety of structures, materials, and schemes to achieve excellent sensing performance with extreme reliability and robustness. One structure used more commonly in nature is the “hair”. Hair-like sensors and actuators are used for acoustic, chemical, flow, pressure, and gas sensing, among others. Hair-like actuators and passive structures are also used for thermal management, filtering, fluid flow control, etc. This paper discusses opportunities and approaches for developing hair-like biomimetic structures for sensing and actuation.
Keywords :
acoustic devices; biosensors; chemical sensors; flow sensors; gas sensors; microactuators; microsensors; pressure sensors; reliability; thermal management (packaging); 3D biomimetic hair actuator; 3D biomimetic hair sensor; Hair-like actuators; acoustic sensor; chemical sensor; flow sensor; gas sensing; hair-like biomimetic structures; passive structure; pressure sensor; reliability; robustness; thermal management; Hair; Mechanical sensors; Sensitivity; Sensor arrays; Substrates;
Conference_Titel :
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location :
Washington, DC
DOI :
10.1109/IEDM.2013.6724585