DocumentCode
3087498
Title
The approaching of capacitance-voltage measurement toward real-world nano-device
Author
LiLung Lai ; Nan Li ; Zhang, Oscar
Author_Institution
Semicond. Manuf. Int. (Shanghai) Corp., Shanghai, China
fYear
2015
fDate
15-16 March 2015
Firstpage
1
Lastpage
5
Abstract
Owing to the advancing development of electrical technique in analytical laboratory, we already have capability to measure tiny capacitance, down to 100aF, in Nano-dimension, down to 20nm, of the real-world Nano-device using Nanoprobing in SEM or AFM instead of traditional Micro-probing in OM instrument become real of the claim. The mechanism, operation and application are described and discussed in the content.
Keywords
capacitance measurement; integrated circuit measurement; nanoelectronics; scanning electron microscopy; transmission electron microscopy; voltage measurement; AFM; OM instrument; SEM; analytical laboratory; atomic force microscopy; capacitance-voltage measurement; electrical technique; microprobing; nanoprobing; real-world nanodevice; scanning electron microscopy; Capacitance; Capacitance-voltage characteristics; Current measurement; Imaging; Logic gates; Probes; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Technology International Conference (CSTIC), 2015 China
Conference_Location
Shanghai
ISSN
2158-2297
Type
conf
DOI
10.1109/CSTIC.2015.7153454
Filename
7153454
Link To Document