DocumentCode :
3087627
Title :
Wafer-scale flexible graphene strain sensors
Author :
He Tian ; Yi Yang ; Dan Xie ; Yi Shu ; Ya-Long Cui ; Can Wu ; Hua-Lin Cai ; Tian-Ling Ren
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear :
2013
fDate :
9-11 Dec. 2013
Abstract :
In this paper, wafer-scale flexible strain sensors with high-performance are fabricated in one-step laser scribing. The graphene films could be obtained by direct reducing graphene oxide film in a light-scribe DVD burner. Our graphene strain sensor has the gauge factor (GF) of 0.11. In order to enhance the GF further, the graphene micro-ribbon has been used as strain sensor, which has the GF up to 9.49, which is higher than most of the reported that of graphene strain sensors (0.55~6.1). Our devices can meet the needs of specific applications, for example, high GF for low-strain applications and low GF for high deformation applications. Our work indicates that laser scribed flexible graphene strain sensors could be widely used for medical-sensing, bio-sensing, artificial skin and many other areas.
Keywords :
deformation; digital versatile discs; graphene; laser beam applications; microsensors; strain gauges; strain sensors; thin film sensors; C; GF; artificial skin; biosensing; deformation application; direct reducing graphene oxide film; gauge factor; graphene film; graphene microribbon; light-scribe DVD burner; medical-sensing; one-step laser scribing; wafer-scale graphene strain sensor; DVD; Films; Graphene; Lasers; Resistance; Sensors; Strain;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location :
Washington, DC
Type :
conf
DOI :
10.1109/IEDM.2013.6724632
Filename :
6724632
Link To Document :
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