• DocumentCode
    3087754
  • Title

    Negative bias temperature instability lifetime prediction: Problems and solutions

  • Author

    Ji, Zhen ; Hatta, S.F.W.M. ; Zhang, Jian F. ; Ma, J.G. ; Zhang, Wensheng ; Soin, Norhayati ; Kaczer, Ben ; De Gendt, Stefan ; Groeseneken, Guido

  • Author_Institution
    Sch. of Eng., Liverpool John Moores Univ., Liverpool, UK
  • fYear
    2013
  • fDate
    9-11 Dec. 2013
  • Abstract
    Lifetime of pMOSFETs is limited by NBTI. Conventional slow measurement overestimates lifetime due to recovery. The fast techniques suppress recovery, but cannot give reliable prediction. This work proposes a new lifetime prediction technique that overcomes the shortcomings of both slow and fast methods, based on the As-grown-Generation (AG) model. Its advantages over those based on Reaction-Diffusion (RD) and two-stage models include its simple algorithm, only two fitting parameters at a given temperature, and no need for a kinetic model for the as-grown hole traps. This makes it readily implementable in industrial laboratories for process screening.
  • Keywords
    MOSFET; negative bias temperature instability; semiconductor device models; semiconductor device reliability; AG model; NBTI; RD model; as-grown hole traps; as-grown-generation model; industrial laboratory; lifetime prediction technique; negative bias temperature instability lifetime prediction; pMOSFET lifetime; process screening; reaction-diffusion model; two-stage models; Degradation; Educational institutions; Fitting; Reliability; Stress; Stress measurement; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2013 IEEE International
  • Conference_Location
    Washington, DC
  • Type

    conf

  • DOI
    10.1109/IEDM.2013.6724638
  • Filename
    6724638