Title :
A high sensitivity alcohol gas sensor based on TiO2 thin films
Author :
Zhang Hanxia ; Wei Wanli ; Zhang Kailiang ; Wang Fang ; Yuan Yujie ; Yang Zhengchun ; Zhang Tiantian ; Sun Shijiu
Author_Institution :
Sch. of Electron. Inf. Eng., Tianjin Univ. of Technol., Tianjin, China
Abstract :
In this paper, the alcohol gas sensors based on TiO2 thin films deposited by DC magnetron sputtering were fabricated. The effect of annealing temperature on the sensitivity of the samples was invested by varying the annealing temperature from 250°C to 550°C. The surface morphology and crystal orientation were characterized by Atomic Force Microscope (AFM) and X-ray diffraction (XRD). It was found that the sensitivity of the sample annealed at 450°C was higher than that of other samples.
Keywords :
X-ray diffraction; annealing; atomic force microscopy; crystal orientation; gas sensors; organic compounds; sputter deposition; surface morphology; thin film sensors; titanium compounds; AFM; DC magnetron sputtering; TiO2; X-ray diffraction; XRD; alcohol gas sensor; annealing temperature; atomic force microscope; crystal orientation; surface morphology; temperature 250 degC to 550 degC; thin film sensor; Annealing; Atomic layer deposition; Films; Measurement; Temperature sensors;
Conference_Titel :
Semiconductor Technology International Conference (CSTIC), 2015 China
Conference_Location :
Shanghai
DOI :
10.1109/CSTIC.2015.7153478
