A high sensitivity alcohol gas sensor based on TiO2 thin films

Author

Zhang Hanxia ; Wei Wanli ; Zhang Kailiang ; Wang Fang ; Yuan Yujie ; Yang Zhengchun ; Zhang Tiantian ; Sun Shijiu

Author_Institution

Sch. of Electron. Inf. Eng., Tianjin Univ. of Technol., Tianjin, China

fYear

2015

fDate

15-16 March 2015

Firstpage

1

Lastpage

3

Abstract

In this paper, the alcohol gas sensors based on TiO₂ thin films deposited by DC magnetron sputtering were fabricated. The effect of annealing temperature on the sensitivity of the samples was invested by varying the annealing temperature from 250°C to 550°C. The surface morphology and crystal orientation were characterized by Atomic Force Microscope (AFM) and X-ray diffraction (XRD). It was found that the sensitivity of the sample annealed at 450°C was higher than that of other samples.

Keywords

X-ray diffraction; annealing; atomic force microscopy; crystal orientation; gas sensors; organic compounds; sputter deposition; surface morphology; thin film sensors; titanium compounds; AFM; DC magnetron sputtering; TiO₂; X-ray diffraction; XRD; alcohol gas sensor; annealing temperature; atomic force microscope; crystal orientation; surface morphology; temperature 250 degC to 550 degC; thin film sensor; Annealing; Atomic layer deposition; Films; Measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Technology International Conference (CSTIC), 2015 China

Conference_Location

Shanghai

ISSN

2158-2297

Type

conf

DOI

10.1109/CSTIC.2015.7153478

Filename

7153478