DocumentCode :
3088035
Title :
Calibration and nonlinearity compensation for force application in AFM based nanomanipulation
Author :
Xie, Hui ; Vitard, Julien ; Haliyo, Sina ; Régnier, éStphane
Author_Institution :
Inst. des Syst. Intelligents et Robot., Univ. Pierre et Marie Curie - Paris, Fontenay-aux-Roses
fYear :
2008
fDate :
22-26 Sept. 2008
Firstpage :
4024
Lastpage :
4029
Abstract :
Both the extent and accuracy of force application in atomic force microscope (AFM) nanomanipulation are significantly limited by the nonlinearity of the commonly used optical lever with a nonlinear position-sensitive detector (PSD). In order to compensate the nonlinearity of the optical lever, a nonlinear calibration method is presented. This method applies the nonlinear curve fit to a full-range position-voltage response of the photodiode, obtaining a continuous function of its voltage-related sensitivity. Thus, Interaction forces can be defined as integrals of this sensitivity function between any two responses of photodiode voltage outputs, instead of rough transformation with a single conversion factor. The lateral position-voltage response of the photodiode, a universally acknowledged puzzle, was directly characterized by an accurately calibrated force sensor composed of a tippless piezoresistive force sensor, regardless of any knowledge of the cantilevers and laser measuring system. Experiments using a rectangular cantilever (normal force constant 0.24 N/m) demonstrated that the proposed nonlinear calibration method restrained the sensitivity error of normal position-voltage responses to 3.6% and extended the force application range.
Keywords :
atomic force microscopy; calibration; compensation; force control; force sensors; nonlinear control systems; photodiodes; piezoresistive devices; position control; AFM nanomanipulation; atomic force microscope; force application; nonlinear calibration method; nonlinear position-sensitive detector; nonlinearity compensation; optical lever; photodiode; tippless piezoresistive force sensor; Calibration; Force; Nonlinear optics; Optical imaging; Optical sensors; Photodiodes; Sensitivity; Atomic force microscope; force calibration; nanomanipulation; nonlinearity compensation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Robots and Systems, 2008. IROS 2008. IEEE/RSJ International Conference on
Conference_Location :
Nice
Print_ISBN :
978-1-4244-2057-5
Type :
conf
DOI :
10.1109/IROS.2008.4650618
Filename :
4650618
Link To Document :
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