A high order mode 6.4GHz ultra-high sensitivity nanoscale surface acoustic wave biosensor

Author

Hua-Lin Cai ; Yi Yang ; Cang-Ran Guo ; Chang-Jian Zhou ; Tian-Xiang Ye ; Can Wu ; He Tian ; Dan Xie ; Jing Liu ; Tian-Ling Ren

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

fYear

2013

fDate

9-11 Dec. 2013

Abstract

An ultra-high sensitivity Surface Acoustic Wave (SAW) biosensor operated in high order mode for DNA sequences detection is proposed. Nanoscale interdigitals are fabricated on LiNbO₃ substrate to achieve a high quality factor of over 4000 at about 6.4GHz. The biosensor shows an excellent linear response to the target DNA in the range of 1ng/ml to 1μg/ml and the difference of hybridized single DNA base can be distinguished. An effective DNA immobilization increases the frequency shifts greatly, which also contributes to the high sensitivity of 6.7×10^-16g/cm²/Hz.

Keywords

DNA; Q-factor; biosensors; microwave detectors; nanosensors; surface acoustic wave sensors; DNA sequence detection; LiNbO₃; SAW biosensor; effective DNA immobilization; frequency 6.4 GHz; frequency shifts; high order mode ultrahigh sensitivity nanoscale surface acoustic wave biosensor; high quality factor; hybridized single DNA; nanoscale interdigitals; Biosensors; DNA; Delays; Probes; Resonant frequency; Sensitivity; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting (IEDM), 2013 IEEE International

Conference_Location

Washington, DC

Type

conf

DOI

10.1109/IEDM.2013.6724652

Filename

6724652