Title :
A high order mode 6.4GHz ultra-high sensitivity nanoscale surface acoustic wave biosensor
Author :
Hua-Lin Cai ; Yi Yang ; Cang-Ran Guo ; Chang-Jian Zhou ; Tian-Xiang Ye ; Can Wu ; He Tian ; Dan Xie ; Jing Liu ; Tian-Ling Ren
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
An ultra-high sensitivity Surface Acoustic Wave (SAW) biosensor operated in high order mode for DNA sequences detection is proposed. Nanoscale interdigitals are fabricated on LiNbO3 substrate to achieve a high quality factor of over 4000 at about 6.4GHz. The biosensor shows an excellent linear response to the target DNA in the range of 1ng/ml to 1μg/ml and the difference of hybridized single DNA base can be distinguished. An effective DNA immobilization increases the frequency shifts greatly, which also contributes to the high sensitivity of 6.7×10-16g/cm2/Hz.
Keywords :
DNA; Q-factor; biosensors; microwave detectors; nanosensors; surface acoustic wave sensors; DNA sequence detection; LiNbO3; SAW biosensor; effective DNA immobilization; frequency 6.4 GHz; frequency shifts; high order mode ultrahigh sensitivity nanoscale surface acoustic wave biosensor; high quality factor; hybridized single DNA; nanoscale interdigitals; Biosensors; DNA; Delays; Probes; Resonant frequency; Sensitivity; Surface acoustic waves;
Conference_Titel :
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location :
Washington, DC
DOI :
10.1109/IEDM.2013.6724652
