Title :
Thermoelastic effects in Pt IDTs. Impact on the behavior of high-temperature LGS-based SAW devices
Author :
Aubert, T. ; Nicolay, P. ; Sarry, F.
Author_Institution :
Lab. SYMME, Univ. de Savoie, Annecy-le-Vieux, France
Abstract :
Delay lines based on Pt electrodes and the LGS orientations with (0°, 138.5°, 26.7°) and (0°, 22°, 31°) Euler angles are experimentally investigated up to 700°C. Big discrepancies between the frequency-temperature laws for devices made with different Pt relative thicknesses are observed, in particular on the (0°, 22°, 31°) orientation. Simulations show that this phenomenon could be related to the large thermoelastic effects happening in Pt electrodes when the temperature rises.
Keywords :
interdigital transducers; platinum; surface acoustic wave delay lines; thermoelasticity; Euler angles; LGS orientations; La3Ga5SiO14; Pt; delay lines; frequency-temperature laws; high-temperature LGS-based SAW devices; interdigital transducers; platinum IDT; platinum electrodes; platinum relative thickness; thermoelastic effects; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Temperature sensors; Pt IDT; SAW; langasite; thermoelastic effects;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0067
