• DocumentCode
    3091128
  • Title

    Thermoelastic effects in Pt IDTs. Impact on the behavior of high-temperature LGS-based SAW devices

  • Author

    Aubert, T. ; Nicolay, P. ; Sarry, F.

  • Author_Institution
    Lab. SYMME, Univ. de Savoie, Annecy-le-Vieux, France
  • fYear
    2013
  • fDate
    21-25 July 2013
  • Firstpage
    259
  • Lastpage
    262
  • Abstract
    Delay lines based on Pt electrodes and the LGS orientations with (0°, 138.5°, 26.7°) and (0°, 22°, 31°) Euler angles are experimentally investigated up to 700°C. Big discrepancies between the frequency-temperature laws for devices made with different Pt relative thicknesses are observed, in particular on the (0°, 22°, 31°) orientation. Simulations show that this phenomenon could be related to the large thermoelastic effects happening in Pt electrodes when the temperature rises.
  • Keywords
    interdigital transducers; platinum; surface acoustic wave delay lines; thermoelasticity; Euler angles; LGS orientations; La3Ga5SiO14; Pt; delay lines; frequency-temperature laws; high-temperature LGS-based SAW devices; interdigital transducers; platinum IDT; platinum electrodes; platinum relative thickness; thermoelastic effects; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Temperature sensors; Pt IDT; SAW; langasite; thermoelastic effects;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2013 IEEE International
  • Conference_Location
    Prague
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4673-5684-8
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2013.0067
  • Filename
    6724793
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3091128