Microwave acoustic properties of diamond single crystal as a substrate for High-overtone Bulk Acoustic Resonator

Author

Sorokin, Boris P. ; Kvashnin, Gennagy M. ; Volkov, Alexander P. ; Bormashov, Vitaly S. ; Aksenenkov, Vitaly V. ; Kuznetsov, Mikhail S. ; Telichko, Arseny V. ; Gordeev, Georgy I.

Author_Institution

Technol. Inst. for Superhard & Novel Carbon Mater. (TISNCM), Troitsk, Russia

fYear

2013

fDate

21-25 July 2013

Firstpage

1684

Lastpage

1687

Abstract

The piezoelectric layered structure Me1/AlN/Me2/single crystalline diamond was developed. Acoustic properties of number the layered structures have been studied on microwave frequency band. The frequency dependence of quality factor was estimated as Q·f ≈ 5.6·10¹³. The pressure and temperature influence on the resonant frequency have been studied. First resonant overtones with Q ~ 2500 were observed on super high frequencies ~ 19.5 GHz.

Keywords

acoustic emission; acoustic microwave devices; acoustic resonators; diamond; high-frequency effects; piezoelectric materials; C; Me1-AlN-Me2-single crystalline diamond; diamond single crystal; first resonant overtones; frequency dependence; high-overtone bulk acoustic resonator; microwave acoustic properties; microwave frequency band; piezoelectric layered structure; pressure influence; quality factor; resonant frequency; substrate; temperature influence; Acoustics; Diamonds; Films; III-V semiconductor materials; Resonant frequency; Substrates; Temperature dependence; AlN; HBAR; diamond single crystal; piezoelectric layered structure;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0429

Filename

6724815